JPS5496157U - - Google Patents
Info
- Publication number
- JPS5496157U JPS5496157U JP16953877U JP16953877U JPS5496157U JP S5496157 U JPS5496157 U JP S5496157U JP 16953877 U JP16953877 U JP 16953877U JP 16953877 U JP16953877 U JP 16953877U JP S5496157 U JPS5496157 U JP S5496157U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16953877U JPS5496157U (https=) | 1977-12-19 | 1977-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16953877U JPS5496157U (https=) | 1977-12-19 | 1977-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5496157U true JPS5496157U (https=) | 1979-07-07 |
Family
ID=29171695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16953877U Pending JPS5496157U (https=) | 1977-12-19 | 1977-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5496157U (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6154639A (ja) * | 1984-08-27 | 1986-03-18 | Hitachi Ltd | 半導体ウエ−ハ移し換え装置 |
| JPH06302573A (ja) * | 1993-04-16 | 1994-10-28 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
-
1977
- 1977-12-19 JP JP16953877U patent/JPS5496157U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6154639A (ja) * | 1984-08-27 | 1986-03-18 | Hitachi Ltd | 半導体ウエ−ハ移し換え装置 |
| JPH06302573A (ja) * | 1993-04-16 | 1994-10-28 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |