JPS549178B2 - - Google Patents

Info

Publication number
JPS549178B2
JPS549178B2 JP5592173A JP5592173A JPS549178B2 JP S549178 B2 JPS549178 B2 JP S549178B2 JP 5592173 A JP5592173 A JP 5592173A JP 5592173 A JP5592173 A JP 5592173A JP S549178 B2 JPS549178 B2 JP S549178B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5592173A
Other languages
Japanese (ja)
Other versions
JPS504023A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5592173A priority Critical patent/JPS549178B2/ja
Publication of JPS504023A publication Critical patent/JPS504023A/ja
Publication of JPS549178B2 publication Critical patent/JPS549178B2/ja
Expired legal-status Critical Current

Links

JP5592173A 1973-05-19 1973-05-19 Expired JPS549178B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5592173A JPS549178B2 (en) 1973-05-19 1973-05-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5592173A JPS549178B2 (en) 1973-05-19 1973-05-19

Publications (2)

Publication Number Publication Date
JPS504023A JPS504023A (en) 1975-01-16
JPS549178B2 true JPS549178B2 (en) 1979-04-21

Family

ID=13012559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5592173A Expired JPS549178B2 (en) 1973-05-19 1973-05-19

Country Status (1)

Country Link
JP (1) JPS549178B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0566097B2 (en) * 1987-11-19 1993-09-21 Kibun Shokuhin Kk

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5261077B2 (en) 2008-08-29 2013-08-14 大日本スクリーン製造株式会社 Substrate cleaning method and substrate cleaning apparatus
JP2013089797A (en) 2011-10-19 2013-05-13 Ebara Corp Substrate cleaning method and substrate cleaning device
JP6093569B2 (en) 2012-12-28 2017-03-08 株式会社荏原製作所 Substrate cleaning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0566097B2 (en) * 1987-11-19 1993-09-21 Kibun Shokuhin Kk

Also Published As

Publication number Publication date
JPS504023A (en) 1975-01-16

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