JPS549130A - Method of regenerating copper etching electrolyte - Google Patents

Method of regenerating copper etching electrolyte

Info

Publication number
JPS549130A
JPS549130A JP7480077A JP7480077A JPS549130A JP S549130 A JPS549130 A JP S549130A JP 7480077 A JP7480077 A JP 7480077A JP 7480077 A JP7480077 A JP 7480077A JP S549130 A JPS549130 A JP S549130A
Authority
JP
Japan
Prior art keywords
copper etching
etching electrolyte
regenerating copper
regenerating
electrolyte
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7480077A
Other languages
Japanese (ja)
Other versions
JPS556711B2 (en
Inventor
Toshiaki Tsurushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7480077A priority Critical patent/JPS549130A/en
Publication of JPS549130A publication Critical patent/JPS549130A/en
Publication of JPS556711B2 publication Critical patent/JPS556711B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE:To effectively regenerate copper in short time without a diaphragm while reproducing S2O<2>8<-> from SO<2>4<-> through electrolysis with the potential of a cathode controlled to a specified value after treatment of copper with an electrolyte containing S2O<2>
JP7480077A 1977-06-23 1977-06-23 Method of regenerating copper etching electrolyte Granted JPS549130A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7480077A JPS549130A (en) 1977-06-23 1977-06-23 Method of regenerating copper etching electrolyte

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7480077A JPS549130A (en) 1977-06-23 1977-06-23 Method of regenerating copper etching electrolyte

Publications (2)

Publication Number Publication Date
JPS549130A true JPS549130A (en) 1979-01-23
JPS556711B2 JPS556711B2 (en) 1980-02-19

Family

ID=13557734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7480077A Granted JPS549130A (en) 1977-06-23 1977-06-23 Method of regenerating copper etching electrolyte

Country Status (1)

Country Link
JP (1) JPS549130A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0665309A1 (en) * 1994-01-31 1995-08-02 Emil Krechen Industrievertretungen GmbH Copper etching process

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5849169U (en) * 1981-09-26 1983-04-02 株式会社東芝 Outdoor unit cable outlet structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0665309A1 (en) * 1994-01-31 1995-08-02 Emil Krechen Industrievertretungen GmbH Copper etching process

Also Published As

Publication number Publication date
JPS556711B2 (en) 1980-02-19

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