JPS5491069U - - Google Patents
Info
- Publication number
- JPS5491069U JPS5491069U JP16441677U JP16441677U JPS5491069U JP S5491069 U JPS5491069 U JP S5491069U JP 16441677 U JP16441677 U JP 16441677U JP 16441677 U JP16441677 U JP 16441677U JP S5491069 U JPS5491069 U JP S5491069U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16441677U JPS5491069U (ja) | 1977-12-09 | 1977-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16441677U JPS5491069U (ja) | 1977-12-09 | 1977-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5491069U true JPS5491069U (ja) | 1979-06-27 |
Family
ID=29161932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16441677U Pending JPS5491069U (ja) | 1977-12-09 | 1977-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5491069U (ja) |
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1977
- 1977-12-09 JP JP16441677U patent/JPS5491069U/ja active Pending