JPS5488271U - - Google Patents
Info
- Publication number
- JPS5488271U JPS5488271U JP16268277U JP16268277U JPS5488271U JP S5488271 U JPS5488271 U JP S5488271U JP 16268277 U JP16268277 U JP 16268277U JP 16268277 U JP16268277 U JP 16268277U JP S5488271 U JPS5488271 U JP S5488271U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16268277U JPS5843226Y2 (ja) | 1977-12-02 | 1977-12-02 | 素子検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16268277U JPS5843226Y2 (ja) | 1977-12-02 | 1977-12-02 | 素子検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5488271U true JPS5488271U (enExample) | 1979-06-22 |
| JPS5843226Y2 JPS5843226Y2 (ja) | 1983-09-30 |
Family
ID=29158641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16268277U Expired JPS5843226Y2 (ja) | 1977-12-02 | 1977-12-02 | 素子検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5843226Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5825243A (ja) * | 1981-08-07 | 1983-02-15 | Hitachi Ltd | 半導体ウェーハ処理方法 |
-
1977
- 1977-12-02 JP JP16268277U patent/JPS5843226Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5825243A (ja) * | 1981-08-07 | 1983-02-15 | Hitachi Ltd | 半導体ウェーハ処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5843226Y2 (ja) | 1983-09-30 |