JPS5487068U - - Google Patents
Info
- Publication number
- JPS5487068U JPS5487068U JP16110077U JP16110077U JPS5487068U JP S5487068 U JPS5487068 U JP S5487068U JP 16110077 U JP16110077 U JP 16110077U JP 16110077 U JP16110077 U JP 16110077U JP S5487068 U JPS5487068 U JP S5487068U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977161100U JPS5647949Y2 (https=) | 1977-12-01 | 1977-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977161100U JPS5647949Y2 (https=) | 1977-12-01 | 1977-12-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5487068U true JPS5487068U (https=) | 1979-06-20 |
| JPS5647949Y2 JPS5647949Y2 (https=) | 1981-11-10 |
Family
ID=29155490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977161100U Expired JPS5647949Y2 (https=) | 1977-12-01 | 1977-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5647949Y2 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4964097A (https=) * | 1972-06-30 | 1974-06-21 |
-
1977
- 1977-12-01 JP JP1977161100U patent/JPS5647949Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4964097A (https=) * | 1972-06-30 | 1974-06-21 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5647949Y2 (https=) | 1981-11-10 |