JPS5485498A - Laser-processing apparatus - Google Patents

Laser-processing apparatus

Info

Publication number
JPS5485498A
JPS5485498A JP15408877A JP15408877A JPS5485498A JP S5485498 A JPS5485498 A JP S5485498A JP 15408877 A JP15408877 A JP 15408877A JP 15408877 A JP15408877 A JP 15408877A JP S5485498 A JPS5485498 A JP S5485498A
Authority
JP
Japan
Prior art keywords
temperature
effect
processed
controlling
freezing element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15408877A
Other languages
Japanese (ja)
Other versions
JPS5940553B2 (en
Inventor
Tatsumi Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP52154088A priority Critical patent/JPS5940553B2/en
Publication of JPS5485498A publication Critical patent/JPS5485498A/en
Publication of JPS5940553B2 publication Critical patent/JPS5940553B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)

Abstract

PURPOSE: To control the temperature of an object to be processed at high accuracies and to improve the precision and efficiency of processing by a simple constitution by heating and preheating the object by use of the Pertier effect of semiconductors.
CONSTITUTION: An electronic freezing element 21 on an XY table 20 is provided with one or a plurality of element(s) given by the drawing. A temperature control unit 25 comparatively judges the table temperature detected at a temperature measuring unit 23 on a basis of a predetermined processing temperature, actuating a DC power source 26, and controlling the electric freezing element 23. In the electronic freezing element 21, exthothermic and endothermic reactions develop at a metal piece 21 and electrodes 14, 15 by the Pertier effect. An object 6 is processed in such temperature conditions suitable to the material and the shape by controlling the effect.
COPYRIGHT: (C)1979,JPO&Japio
JP52154088A 1977-12-21 1977-12-21 Laser processing equipment Expired JPS5940553B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52154088A JPS5940553B2 (en) 1977-12-21 1977-12-21 Laser processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52154088A JPS5940553B2 (en) 1977-12-21 1977-12-21 Laser processing equipment

Publications (2)

Publication Number Publication Date
JPS5485498A true JPS5485498A (en) 1979-07-07
JPS5940553B2 JPS5940553B2 (en) 1984-10-01

Family

ID=15576624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52154088A Expired JPS5940553B2 (en) 1977-12-21 1977-12-21 Laser processing equipment

Country Status (1)

Country Link
JP (1) JPS5940553B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08197267A (en) * 1995-01-18 1996-08-06 Taiyo Yuden Co Ltd Laser beam machine and production of electronic parts using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08197267A (en) * 1995-01-18 1996-08-06 Taiyo Yuden Co Ltd Laser beam machine and production of electronic parts using the same

Also Published As

Publication number Publication date
JPS5940553B2 (en) 1984-10-01

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