JPS5483681A - Treating liquid circulation mechanism for coupled chemical treatment apparatus - Google Patents
Treating liquid circulation mechanism for coupled chemical treatment apparatusInfo
- Publication number
- JPS5483681A JPS5483681A JP15053977A JP15053977A JPS5483681A JP S5483681 A JPS5483681 A JP S5483681A JP 15053977 A JP15053977 A JP 15053977A JP 15053977 A JP15053977 A JP 15053977A JP S5483681 A JPS5483681 A JP S5483681A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- receiver
- circulation
- treatment apparatus
- coupled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- ing And Chemical Polishing (AREA)
Abstract
PURPOSE: To provide the title circulation mechanism by which sufficient circulation of a chemically treating liquid can be carried out by placing a receiver for the liquid sprayed in two or more chamical treatment apparatus coupled, and feeding the liquid in the receiver to other apparatus through circulation piping owing to a difference in liquid surface.
CONSTITUTION: Receiver 9 for chemically treating liquid 2 sprayed 5 is placed in coupled chemical treatment apparatus 1 at a position higher than the surface of liquid 2. Circulation piping 10 is extended from receiver 9 to other coupled apparatus 1 through connection pipe 6. With the constitution, liquid 2 is fed from receiver 9 to apparatus 1 owing to a difference in liquid surface and liquid 2 of the same amt. can be returned through pipe 6. Since spray pump 3 can also be used as a circulation pump, any circulation pump is not required. Piping 10 is all arranged in apparatus 1, and hence the apparatus can be made compact and a liquid leak does not occur.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15053977A JPS6041981B2 (en) | 1977-12-16 | 1977-12-16 | Processing liquid circulation mechanism of connected chemical processing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15053977A JPS6041981B2 (en) | 1977-12-16 | 1977-12-16 | Processing liquid circulation mechanism of connected chemical processing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5483681A true JPS5483681A (en) | 1979-07-03 |
JPS6041981B2 JPS6041981B2 (en) | 1985-09-19 |
Family
ID=15499070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15053977A Expired JPS6041981B2 (en) | 1977-12-16 | 1977-12-16 | Processing liquid circulation mechanism of connected chemical processing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6041981B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5876135A (en) * | 1981-11-02 | 1983-05-09 | Hitachi Ltd | Mechanism for supplying chemical liquid |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6440891U (en) * | 1987-09-05 | 1989-03-10 |
-
1977
- 1977-12-16 JP JP15053977A patent/JPS6041981B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5876135A (en) * | 1981-11-02 | 1983-05-09 | Hitachi Ltd | Mechanism for supplying chemical liquid |
Also Published As
Publication number | Publication date |
---|---|
JPS6041981B2 (en) | 1985-09-19 |
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