JPS5483021U - - Google Patents
Info
- Publication number
- JPS5483021U JPS5483021U JP15818277U JP15818277U JPS5483021U JP S5483021 U JPS5483021 U JP S5483021U JP 15818277 U JP15818277 U JP 15818277U JP 15818277 U JP15818277 U JP 15818277U JP S5483021 U JPS5483021 U JP S5483021U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15818277U JPS5483021U (en) | 1977-11-24 | 1977-11-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15818277U JPS5483021U (en) | 1977-11-24 | 1977-11-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5483021U true JPS5483021U (en) | 1979-06-12 |
Family
ID=29149800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15818277U Pending JPS5483021U (en) | 1977-11-24 | 1977-11-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5483021U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015198100A (en) * | 2014-03-31 | 2015-11-09 | 平田機工株式会社 | Chamber device and processing system |
US10043689B2 (en) | 2015-06-05 | 2018-08-07 | Hirata Corporation | Chamber apparatus and processing system |
-
1977
- 1977-11-24 JP JP15818277U patent/JPS5483021U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015198100A (en) * | 2014-03-31 | 2015-11-09 | 平田機工株式会社 | Chamber device and processing system |
US10043689B2 (en) | 2015-06-05 | 2018-08-07 | Hirata Corporation | Chamber apparatus and processing system |