JPS548121A - Controller for concentration of plating bath - Google Patents

Controller for concentration of plating bath

Info

Publication number
JPS548121A
JPS548121A JP7422277A JP7422277A JPS548121A JP S548121 A JPS548121 A JP S548121A JP 7422277 A JP7422277 A JP 7422277A JP 7422277 A JP7422277 A JP 7422277A JP S548121 A JPS548121 A JP S548121A
Authority
JP
Japan
Prior art keywords
plating bath
concentration
controller
concn
bath
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7422277A
Other languages
Japanese (ja)
Other versions
JPS5654387B2 (en
Inventor
Hiroshi Kumasaka
Yoshihide Kamei
Susumu Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP7422277A priority Critical patent/JPS548121A/en
Publication of JPS548121A publication Critical patent/JPS548121A/en
Publication of JPS5654387B2 publication Critical patent/JPS5654387B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemically Coating (AREA)
  • Control Of Non-Electrical Variables (AREA)

Abstract

PURPOSE: To always maintain the Ni concn. of a plating bath constant by measuring the concn. of the bath with a reagent in Ni chemical plating work and actuating a fresh Ni plating bath supplier in accordance with the amt. of the reagent needed to attain a prescribed concn.
COPYRIGHT: (C)1979,JPO&Japio
JP7422277A 1977-06-21 1977-06-21 Controller for concentration of plating bath Granted JPS548121A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7422277A JPS548121A (en) 1977-06-21 1977-06-21 Controller for concentration of plating bath

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7422277A JPS548121A (en) 1977-06-21 1977-06-21 Controller for concentration of plating bath

Publications (2)

Publication Number Publication Date
JPS548121A true JPS548121A (en) 1979-01-22
JPS5654387B2 JPS5654387B2 (en) 1981-12-25

Family

ID=13540934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7422277A Granted JPS548121A (en) 1977-06-21 1977-06-21 Controller for concentration of plating bath

Country Status (1)

Country Link
JP (1) JPS548121A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548122A (en) * 1977-06-21 1979-01-22 Canon Inc Controller for concentration of plating bath

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5274223A (en) * 1975-12-17 1977-06-22 Hitachi Ltd Pick up tube

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5274223A (en) * 1975-12-17 1977-06-22 Hitachi Ltd Pick up tube

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548122A (en) * 1977-06-21 1979-01-22 Canon Inc Controller for concentration of plating bath
JPS5654388B2 (en) * 1977-06-21 1981-12-25

Also Published As

Publication number Publication date
JPS5654387B2 (en) 1981-12-25

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