JPS548111Y2 - - Google Patents

Info

Publication number
JPS548111Y2
JPS548111Y2 JP1976066012U JP6601276U JPS548111Y2 JP S548111 Y2 JPS548111 Y2 JP S548111Y2 JP 1976066012 U JP1976066012 U JP 1976066012U JP 6601276 U JP6601276 U JP 6601276U JP S548111 Y2 JPS548111 Y2 JP S548111Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976066012U
Other languages
Japanese (ja)
Other versions
JPS52155743U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976066012U priority Critical patent/JPS548111Y2/ja
Publication of JPS52155743U publication Critical patent/JPS52155743U/ja
Application granted granted Critical
Publication of JPS548111Y2 publication Critical patent/JPS548111Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1976066012U 1976-05-21 1976-05-21 Expired JPS548111Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976066012U JPS548111Y2 (https=) 1976-05-21 1976-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976066012U JPS548111Y2 (https=) 1976-05-21 1976-05-21

Publications (2)

Publication Number Publication Date
JPS52155743U JPS52155743U (https=) 1977-11-26
JPS548111Y2 true JPS548111Y2 (https=) 1979-04-14

Family

ID=28531521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976066012U Expired JPS548111Y2 (https=) 1976-05-21 1976-05-21

Country Status (1)

Country Link
JP (1) JPS548111Y2 (https=)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123069A (en) * 1974-08-21 1976-02-24 Tokyo Shibaura Electric Co Handotaiketsushono seizohoho

Also Published As

Publication number Publication date
JPS52155743U (https=) 1977-11-26

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