JPS548111Y2 - - Google Patents
Info
- Publication number
- JPS548111Y2 JPS548111Y2 JP1976066012U JP6601276U JPS548111Y2 JP S548111 Y2 JPS548111 Y2 JP S548111Y2 JP 1976066012 U JP1976066012 U JP 1976066012U JP 6601276 U JP6601276 U JP 6601276U JP S548111 Y2 JPS548111 Y2 JP S548111Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976066012U JPS548111Y2 (en:Method) | 1976-05-21 | 1976-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976066012U JPS548111Y2 (en:Method) | 1976-05-21 | 1976-05-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52155743U JPS52155743U (en:Method) | 1977-11-26 |
| JPS548111Y2 true JPS548111Y2 (en:Method) | 1979-04-14 |
Family
ID=28531521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976066012U Expired JPS548111Y2 (en:Method) | 1976-05-21 | 1976-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS548111Y2 (en:Method) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123069A (en) * | 1974-08-21 | 1976-02-24 | Tokyo Shibaura Electric Co | Handotaiketsushono seizohoho |
-
1976
- 1976-05-21 JP JP1976066012U patent/JPS548111Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52155743U (en:Method) | 1977-11-26 |