JPS5474743U - - Google Patents
Info
- Publication number
- JPS5474743U JPS5474743U JP14893777U JP14893777U JPS5474743U JP S5474743 U JPS5474743 U JP S5474743U JP 14893777 U JP14893777 U JP 14893777U JP 14893777 U JP14893777 U JP 14893777U JP S5474743 U JPS5474743 U JP S5474743U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14893777U JPS5474743U (enExample) | 1977-11-05 | 1977-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14893777U JPS5474743U (enExample) | 1977-11-05 | 1977-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5474743U true JPS5474743U (enExample) | 1979-05-28 |
Family
ID=29131798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14893777U Pending JPS5474743U (enExample) | 1977-11-05 | 1977-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5474743U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5528386A (en) * | 1978-08-21 | 1980-02-28 | Vac Tec Syst | Magnetron sputter apparatus |
| JPS6067668A (ja) * | 1983-09-21 | 1985-04-18 | Fujitsu Ltd | スパッタリング装置 |
-
1977
- 1977-11-05 JP JP14893777U patent/JPS5474743U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5528386A (en) * | 1978-08-21 | 1980-02-28 | Vac Tec Syst | Magnetron sputter apparatus |
| JPS6067668A (ja) * | 1983-09-21 | 1985-04-18 | Fujitsu Ltd | スパッタリング装置 |