JPS5474743U - - Google Patents

Info

Publication number
JPS5474743U
JPS5474743U JP14893777U JP14893777U JPS5474743U JP S5474743 U JPS5474743 U JP S5474743U JP 14893777 U JP14893777 U JP 14893777U JP 14893777 U JP14893777 U JP 14893777U JP S5474743 U JPS5474743 U JP S5474743U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14893777U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14893777U priority Critical patent/JPS5474743U/ja
Publication of JPS5474743U publication Critical patent/JPS5474743U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14893777U 1977-11-05 1977-11-05 Pending JPS5474743U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14893777U JPS5474743U (enrdf_load_stackoverflow) 1977-11-05 1977-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14893777U JPS5474743U (enrdf_load_stackoverflow) 1977-11-05 1977-11-05

Publications (1)

Publication Number Publication Date
JPS5474743U true JPS5474743U (enrdf_load_stackoverflow) 1979-05-28

Family

ID=29131798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14893777U Pending JPS5474743U (enrdf_load_stackoverflow) 1977-11-05 1977-11-05

Country Status (1)

Country Link
JP (1) JPS5474743U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528386A (en) * 1978-08-21 1980-02-28 Vac Tec Syst Magnetron sputter apparatus
JPS6067668A (ja) * 1983-09-21 1985-04-18 Fujitsu Ltd スパッタリング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528386A (en) * 1978-08-21 1980-02-28 Vac Tec Syst Magnetron sputter apparatus
JPS6067668A (ja) * 1983-09-21 1985-04-18 Fujitsu Ltd スパッタリング装置

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