JPS547245B2 - - Google Patents
Info
- Publication number
- JPS547245B2 JPS547245B2 JP10098673A JP10098673A JPS547245B2 JP S547245 B2 JPS547245 B2 JP S547245B2 JP 10098673 A JP10098673 A JP 10098673A JP 10098673 A JP10098673 A JP 10098673A JP S547245 B2 JPS547245 B2 JP S547245B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Conductive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10098673A JPS547245B2 (https=) | 1973-09-07 | 1973-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10098673A JPS547245B2 (https=) | 1973-09-07 | 1973-09-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5051406A JPS5051406A (https=) | 1975-05-08 |
| JPS547245B2 true JPS547245B2 (https=) | 1979-04-05 |
Family
ID=14288631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10098673A Expired JPS547245B2 (https=) | 1973-09-07 | 1973-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS547245B2 (https=) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4542579A (en) * | 1975-06-30 | 1985-09-24 | International Business Machines Corporation | Method for forming aluminum oxide dielectric isolation in integrated circuits |
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1973
- 1973-09-07 JP JP10098673A patent/JPS547245B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5051406A (https=) | 1975-05-08 |