JPS5468148A - Electron ray detector - Google Patents
Electron ray detectorInfo
- Publication number
- JPS5468148A JPS5468148A JP13462877A JP13462877A JPS5468148A JP S5468148 A JPS5468148 A JP S5468148A JP 13462877 A JP13462877 A JP 13462877A JP 13462877 A JP13462877 A JP 13462877A JP S5468148 A JPS5468148 A JP S5468148A
- Authority
- JP
- Japan
- Prior art keywords
- detector
- surrounding
- external light
- light
- electron ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable to use the electron ray detector even if the surrounding of the test piece is in visible condition, by constituting the scintillator so that it does not transmit external light and by covering the surrounding of the light guide with opaque material.
CONSTITUTION: The part of the scintillator 5 consisting of the conductive film and light emitting element is constituted so that external light is not transmitted. Further, the photo shield cylinder 9 of opaque insulator is provided at the external circumference of the light guide 7, this is mounted on the detector cylinder 11, and constitution is made that the external light can be interrupted. Accordingly, no external light is fed in the detector and the detector can be used even if the surrounding of the test piece 3 is in visible condition.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13462877A JPS5468148A (en) | 1977-11-11 | 1977-11-11 | Electron ray detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13462877A JPS5468148A (en) | 1977-11-11 | 1977-11-11 | Electron ray detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5468148A true JPS5468148A (en) | 1979-06-01 |
Family
ID=15132807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13462877A Pending JPS5468148A (en) | 1977-11-11 | 1977-11-11 | Electron ray detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5468148A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54118068U (en) * | 1978-02-07 | 1979-08-18 | ||
JP2012138324A (en) * | 2010-12-28 | 2012-07-19 | Topcon Corp | Secondary electron detector and charge particle beam apparatus |
-
1977
- 1977-11-11 JP JP13462877A patent/JPS5468148A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54118068U (en) * | 1978-02-07 | 1979-08-18 | ||
JP2012138324A (en) * | 2010-12-28 | 2012-07-19 | Topcon Corp | Secondary electron detector and charge particle beam apparatus |
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