JPS5468148A - Electron ray detector - Google Patents

Electron ray detector

Info

Publication number
JPS5468148A
JPS5468148A JP13462877A JP13462877A JPS5468148A JP S5468148 A JPS5468148 A JP S5468148A JP 13462877 A JP13462877 A JP 13462877A JP 13462877 A JP13462877 A JP 13462877A JP S5468148 A JPS5468148 A JP S5468148A
Authority
JP
Japan
Prior art keywords
detector
surrounding
external light
light
electron ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13462877A
Other languages
Japanese (ja)
Inventor
Kenzo Kuboki
Tadao Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13462877A priority Critical patent/JPS5468148A/en
Publication of JPS5468148A publication Critical patent/JPS5468148A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable to use the electron ray detector even if the surrounding of the test piece is in visible condition, by constituting the scintillator so that it does not transmit external light and by covering the surrounding of the light guide with opaque material.
CONSTITUTION: The part of the scintillator 5 consisting of the conductive film and light emitting element is constituted so that external light is not transmitted. Further, the photo shield cylinder 9 of opaque insulator is provided at the external circumference of the light guide 7, this is mounted on the detector cylinder 11, and constitution is made that the external light can be interrupted. Accordingly, no external light is fed in the detector and the detector can be used even if the surrounding of the test piece 3 is in visible condition.
COPYRIGHT: (C)1979,JPO&Japio
JP13462877A 1977-11-11 1977-11-11 Electron ray detector Pending JPS5468148A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13462877A JPS5468148A (en) 1977-11-11 1977-11-11 Electron ray detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13462877A JPS5468148A (en) 1977-11-11 1977-11-11 Electron ray detector

Publications (1)

Publication Number Publication Date
JPS5468148A true JPS5468148A (en) 1979-06-01

Family

ID=15132807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13462877A Pending JPS5468148A (en) 1977-11-11 1977-11-11 Electron ray detector

Country Status (1)

Country Link
JP (1) JPS5468148A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118068U (en) * 1978-02-07 1979-08-18
JP2012138324A (en) * 2010-12-28 2012-07-19 Topcon Corp Secondary electron detector and charge particle beam apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118068U (en) * 1978-02-07 1979-08-18
JP2012138324A (en) * 2010-12-28 2012-07-19 Topcon Corp Secondary electron detector and charge particle beam apparatus

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