JPS5462855A - Minute excitor - Google Patents
Minute excitorInfo
- Publication number
- JPS5462855A JPS5462855A JP12868577A JP12868577A JPS5462855A JP S5462855 A JPS5462855 A JP S5462855A JP 12868577 A JP12868577 A JP 12868577A JP 12868577 A JP12868577 A JP 12868577A JP S5462855 A JPS5462855 A JP S5462855A
- Authority
- JP
- Japan
- Prior art keywords
- symmetrical
- reciprocating motion
- flapper
- vibration transmitting
- force motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
Abstract
PURPOSE: To provide a stable and highly accurate device by applying the fluid of the pressure corresponding to controlling of symmetrical nozzle parts through reciprocating motion of a flapper via force motor to the respective bellows actuator symmetrical to a vibration transmitting member.
CONSTITUTION: When the force motor provided with a pair of motors 13, 14 formed with permanent magnets 13b, 14b, moving winding coils 13c, 14, etc. is driven by a 3-wire type power source, the coils 13c, 14c, which are of good linear characteristics and are connected by means of a connecting member 15 are moved along a guide shaft 16, causing a flapper 7 make reciprocating motion together with the member 15. This causes the nozzles 5a, 6b of symmetrical nozzle means 5, 6 to be controlled so that the pressure fluids from the means 5, 6 are applied to the bellows actuators 3, 4 which are opposing and symmetrical to a vibration transmitting member 2, whereby a vibrating base 1 is vibrated. Minute acceleration control is accomplished highly accurately and stably by the push-pull mechanism free from mechanical hysteresis.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12868577A JPS5462855A (en) | 1977-10-28 | 1977-10-28 | Minute excitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12868577A JPS5462855A (en) | 1977-10-28 | 1977-10-28 | Minute excitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5462855A true JPS5462855A (en) | 1979-05-21 |
Family
ID=14990887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12868577A Pending JPS5462855A (en) | 1977-10-28 | 1977-10-28 | Minute excitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5462855A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08136820A (en) * | 1994-11-11 | 1996-05-31 | Koike Seiki Kk | Sample stage vertical fine adjustment device for laser scanning microscope |
| WO2016017744A1 (en) * | 2014-07-30 | 2016-02-04 | 国際計測器株式会社 | Vibration-applying device, electrodynamic actuator, crossed guideway, linear guideway, and vibrating table |
-
1977
- 1977-10-28 JP JP12868577A patent/JPS5462855A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08136820A (en) * | 1994-11-11 | 1996-05-31 | Koike Seiki Kk | Sample stage vertical fine adjustment device for laser scanning microscope |
| WO2016017744A1 (en) * | 2014-07-30 | 2016-02-04 | 国際計測器株式会社 | Vibration-applying device, electrodynamic actuator, crossed guideway, linear guideway, and vibrating table |
| JP2018185340A (en) * | 2014-07-30 | 2018-11-22 | 国際計測器株式会社 | Vibration device and electrodynamic actuator |
| US10281356B2 (en) | 2014-07-30 | 2019-05-07 | Kokusai Keisokuki Kabushiki Kaisha | Oscillating device, electrodynamic actuator, cross guideway, linear guideway and vibrating table |
| US10436670B2 (en) | 2014-07-30 | 2019-10-08 | Kokusai Keisokuki Kabushiki Kaisha | Oscillating device, electrodynamic actuator, cross guideway, linear guideway and vibrating table |
| CN110530591A (en) * | 2014-07-30 | 2019-12-03 | 国际计测器株式会社 | Power type actuator, exciting device, actuator and its fixed part supporting device |
| CN110530591B (en) * | 2014-07-30 | 2021-12-10 | 国际计测器株式会社 | Electric actuator, vibration exciting device, actuator and fixing part supporting mechanism thereof |
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