JPS5461563U - - Google Patents
Info
- Publication number
- JPS5461563U JPS5461563U JP13607377U JP13607377U JPS5461563U JP S5461563 U JPS5461563 U JP S5461563U JP 13607377 U JP13607377 U JP 13607377U JP 13607377 U JP13607377 U JP 13607377U JP S5461563 U JPS5461563 U JP S5461563U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977136073U JPS583298Y2 (ja) | 1977-10-11 | 1977-10-11 | 電子ビ−ム露光用基板ホルダ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977136073U JPS583298Y2 (ja) | 1977-10-11 | 1977-10-11 | 電子ビ−ム露光用基板ホルダ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5461563U true JPS5461563U (enExample) | 1979-04-28 |
| JPS583298Y2 JPS583298Y2 (ja) | 1983-01-20 |
Family
ID=29106975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977136073U Expired JPS583298Y2 (ja) | 1977-10-11 | 1977-10-11 | 電子ビ−ム露光用基板ホルダ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS583298Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS526084A (en) * | 1975-06-30 | 1977-01-18 | Ibm | Device for positioning specimen |
| JPS5260074A (en) * | 1975-11-12 | 1977-05-18 | Jeol Ltd | Charge particle beam apparatus |
-
1977
- 1977-10-11 JP JP1977136073U patent/JPS583298Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS526084A (en) * | 1975-06-30 | 1977-01-18 | Ibm | Device for positioning specimen |
| JPS5260074A (en) * | 1975-11-12 | 1977-05-18 | Jeol Ltd | Charge particle beam apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS583298Y2 (ja) | 1983-01-20 |