JPS5459263U - - Google Patents
Info
- Publication number
- JPS5459263U JPS5459263U JP13190977U JP13190977U JPS5459263U JP S5459263 U JPS5459263 U JP S5459263U JP 13190977 U JP13190977 U JP 13190977U JP 13190977 U JP13190977 U JP 13190977U JP S5459263 U JPS5459263 U JP S5459263U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977131909U JPS5527240Y2 (et) | 1977-10-03 | 1977-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977131909U JPS5527240Y2 (et) | 1977-10-03 | 1977-10-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5459263U true JPS5459263U (et) | 1979-04-24 |
| JPS5527240Y2 JPS5527240Y2 (et) | 1980-06-30 |
Family
ID=29098945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977131909U Expired JPS5527240Y2 (et) | 1977-10-03 | 1977-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5527240Y2 (et) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015230917A (ja) * | 2014-06-03 | 2015-12-21 | 三菱電機株式会社 | ウエハハンドリング装置、ウエハ用ピンセット |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4911658U (et) * | 1972-05-08 | 1974-01-31 |
-
1977
- 1977-10-03 JP JP1977131909U patent/JPS5527240Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4911658U (et) * | 1972-05-08 | 1974-01-31 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015230917A (ja) * | 2014-06-03 | 2015-12-21 | 三菱電機株式会社 | ウエハハンドリング装置、ウエハ用ピンセット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5527240Y2 (et) | 1980-06-30 |