JPS5453959A - Wafer heating jig - Google Patents

Wafer heating jig

Info

Publication number
JPS5453959A
JPS5453959A JP12070677A JP12070677A JPS5453959A JP S5453959 A JPS5453959 A JP S5453959A JP 12070677 A JP12070677 A JP 12070677A JP 12070677 A JP12070677 A JP 12070677A JP S5453959 A JPS5453959 A JP S5453959A
Authority
JP
Japan
Prior art keywords
wafer heating
heating jig
jig
wafer
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12070677A
Other languages
Japanese (ja)
Other versions
JPS607379B2 (en
Inventor
Masayoshi Yamaguchi
Takemi Hoshina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP12070677A priority Critical patent/JPS607379B2/en
Publication of JPS5453959A publication Critical patent/JPS5453959A/en
Publication of JPS607379B2 publication Critical patent/JPS607379B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP12070677A 1977-10-07 1977-10-07 Wafer heating jig Expired JPS607379B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12070677A JPS607379B2 (en) 1977-10-07 1977-10-07 Wafer heating jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12070677A JPS607379B2 (en) 1977-10-07 1977-10-07 Wafer heating jig

Publications (2)

Publication Number Publication Date
JPS5453959A true JPS5453959A (en) 1979-04-27
JPS607379B2 JPS607379B2 (en) 1985-02-23

Family

ID=14792965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12070677A Expired JPS607379B2 (en) 1977-10-07 1977-10-07 Wafer heating jig

Country Status (1)

Country Link
JP (1) JPS607379B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03217016A (en) * 1990-01-23 1991-09-24 Hitachi Chem Co Ltd Materials for semiconductor manufacturing apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61128474U (en) * 1985-01-30 1986-08-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03217016A (en) * 1990-01-23 1991-09-24 Hitachi Chem Co Ltd Materials for semiconductor manufacturing apparatus

Also Published As

Publication number Publication date
JPS607379B2 (en) 1985-02-23

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