JPS5453352U - - Google Patents
Info
- Publication number
- JPS5453352U JPS5453352U JP12720877U JP12720877U JPS5453352U JP S5453352 U JPS5453352 U JP S5453352U JP 12720877 U JP12720877 U JP 12720877U JP 12720877 U JP12720877 U JP 12720877U JP S5453352 U JPS5453352 U JP S5453352U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977127208U JPS6130277Y2 (en, 2012) | 1977-09-21 | 1977-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977127208U JPS6130277Y2 (en, 2012) | 1977-09-21 | 1977-09-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5453352U true JPS5453352U (en, 2012) | 1979-04-13 |
| JPS6130277Y2 JPS6130277Y2 (en, 2012) | 1986-09-05 |
Family
ID=29089767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977127208U Expired JPS6130277Y2 (en, 2012) | 1977-09-21 | 1977-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6130277Y2 (en, 2012) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5087775A (en, 2012) * | 1973-12-07 | 1975-07-15 |
-
1977
- 1977-09-21 JP JP1977127208U patent/JPS6130277Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5087775A (en, 2012) * | 1973-12-07 | 1975-07-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6130277Y2 (en, 2012) | 1986-09-05 |