JPS5451777A - Method of slicing semiconductor bar - Google Patents

Method of slicing semiconductor bar

Info

Publication number
JPS5451777A
JPS5451777A JP11828377A JP11828377A JPS5451777A JP S5451777 A JPS5451777 A JP S5451777A JP 11828377 A JP11828377 A JP 11828377A JP 11828377 A JP11828377 A JP 11828377A JP S5451777 A JPS5451777 A JP S5451777A
Authority
JP
Japan
Prior art keywords
semiconductor bar
slicing semiconductor
slicing
bar
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11828377A
Other languages
Japanese (ja)
Inventor
Akio Nakamura
Kouhei Toyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Priority to JP11828377A priority Critical patent/JPS5451777A/en
Publication of JPS5451777A publication Critical patent/JPS5451777A/en
Pending legal-status Critical Current

Links

JP11828377A 1977-10-01 1977-10-01 Method of slicing semiconductor bar Pending JPS5451777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11828377A JPS5451777A (en) 1977-10-01 1977-10-01 Method of slicing semiconductor bar

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11828377A JPS5451777A (en) 1977-10-01 1977-10-01 Method of slicing semiconductor bar

Publications (1)

Publication Number Publication Date
JPS5451777A true JPS5451777A (en) 1979-04-23

Family

ID=14732825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11828377A Pending JPS5451777A (en) 1977-10-01 1977-10-01 Method of slicing semiconductor bar

Country Status (1)

Country Link
JP (1) JPS5451777A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04122608A (en) * 1990-09-14 1992-04-23 Shin Etsu Handotai Co Ltd Method and apparatus for severing single crystal ingot by slicer with inner peripheral blade

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3321871A (en) * 1964-03-05 1967-05-30 Cavitron Ultrasonics Inc Ultrasonic cleaning methods and apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3321871A (en) * 1964-03-05 1967-05-30 Cavitron Ultrasonics Inc Ultrasonic cleaning methods and apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04122608A (en) * 1990-09-14 1992-04-23 Shin Etsu Handotai Co Ltd Method and apparatus for severing single crystal ingot by slicer with inner peripheral blade

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