JPS545160B1 - - Google Patents

Info

Publication number
JPS545160B1
JPS545160B1 JP8252171A JP8252171A JPS545160B1 JP S545160 B1 JPS545160 B1 JP S545160B1 JP 8252171 A JP8252171 A JP 8252171A JP 8252171 A JP8252171 A JP 8252171A JP S545160 B1 JPS545160 B1 JP S545160B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8252171A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS545160B1 publication Critical patent/JPS545160B1/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002Preparing wafers
    • H01L21/02005Preparing bulk and homogeneous wafers
    • H01L21/02008Multistep processes
    • H01L21/0201Specific process step
    • H01L21/02024Mirror polishing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B24B37/107Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP8252171A 1970-10-21 1971-10-20 Pending JPS545160B1 (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8267370A 1970-10-21 1970-10-21

Publications (1)

Publication Number Publication Date
JPS545160B1 true JPS545160B1 (zh) 1979-03-14

Family

ID=22172673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8252171A Pending JPS545160B1 (zh) 1970-10-21 1971-10-20

Country Status (5)

Country Link
JP (1) JPS545160B1 (zh)
BE (1) BE774209A (zh)
DE (1) DE2152318A1 (zh)
GB (1) GB1319882A (zh)
NL (1) NL7114274A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149373U (zh) * 1981-03-16 1982-09-20
JPS5871593U (ja) * 1981-11-04 1983-05-14 三菱重工業株式会社 水冷型熱交換器

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531582A (en) * 1978-08-15 1980-03-05 Ibm Free polishing device
US4811522A (en) * 1987-03-23 1989-03-14 Gill Jr Gerald L Counterbalanced polishing apparatus
US5104828A (en) * 1990-03-01 1992-04-14 Intel Corporation Method of planarizing a dielectric formed over a semiconductor substrate
GB2298961B (en) * 1992-05-26 1997-01-08 Toshiba Kk Polishing apparatus for planarizing layer on a semiconductor wafer
JP2914166B2 (ja) * 1994-03-16 1999-06-28 日本電気株式会社 研磨布の表面処理方法および研磨装置
GB9512262D0 (en) 1995-06-16 1995-08-16 Bingham Richard G Tool for computer-controlled machine for optical polishing and figuring

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149373U (zh) * 1981-03-16 1982-09-20
JPS5871593U (ja) * 1981-11-04 1983-05-14 三菱重工業株式会社 水冷型熱交換器

Also Published As

Publication number Publication date
NL7114274A (zh) 1972-04-25
GB1319882A (en) 1973-06-13
DE2152318A1 (de) 1972-04-27
BE774209A (fr) 1972-04-20

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