JPS5451253A - Method of treating developing waste liquor of sensitive resin - Google Patents

Method of treating developing waste liquor of sensitive resin

Info

Publication number
JPS5451253A
JPS5451253A JP11834777A JP11834777A JPS5451253A JP S5451253 A JPS5451253 A JP S5451253A JP 11834777 A JP11834777 A JP 11834777A JP 11834777 A JP11834777 A JP 11834777A JP S5451253 A JPS5451253 A JP S5451253A
Authority
JP
Japan
Prior art keywords
sensitive resin
waste liquor
developing waste
treating
treating developing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11834777A
Other languages
Japanese (ja)
Inventor
Kouzou Mizuno
Masaaki Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unitika Ltd
Original Assignee
Unitika Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unitika Ltd filed Critical Unitika Ltd
Priority to JP11834777A priority Critical patent/JPS5451253A/en
Publication of JPS5451253A publication Critical patent/JPS5451253A/en
Pending legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Removal Of Specific Substances (AREA)
JP11834777A 1977-09-29 1977-09-29 Method of treating developing waste liquor of sensitive resin Pending JPS5451253A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11834777A JPS5451253A (en) 1977-09-29 1977-09-29 Method of treating developing waste liquor of sensitive resin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11834777A JPS5451253A (en) 1977-09-29 1977-09-29 Method of treating developing waste liquor of sensitive resin

Publications (1)

Publication Number Publication Date
JPS5451253A true JPS5451253A (en) 1979-04-21

Family

ID=14734434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11834777A Pending JPS5451253A (en) 1977-09-29 1977-09-29 Method of treating developing waste liquor of sensitive resin

Country Status (1)

Country Link
JP (1) JPS5451253A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6153107A (en) * 1997-08-14 2000-11-28 Asahi Kasei Kogyo Kabushiki Kaisha Process for treating development waste liquor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6153107A (en) * 1997-08-14 2000-11-28 Asahi Kasei Kogyo Kabushiki Kaisha Process for treating development waste liquor
US6379558B1 (en) 1997-08-14 2002-04-30 Asahi Kasei Kabushiki Kaisha Process for treating development waste liquor

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