JPS544914B2 - - Google Patents

Info

Publication number
JPS544914B2
JPS544914B2 JP14657476A JP14657476A JPS544914B2 JP S544914 B2 JPS544914 B2 JP S544914B2 JP 14657476 A JP14657476 A JP 14657476A JP 14657476 A JP14657476 A JP 14657476A JP S544914 B2 JPS544914 B2 JP S544914B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14657476A
Other versions
JPS5371690A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14657476A priority Critical patent/JPS5371690A/ja
Publication of JPS5371690A publication Critical patent/JPS5371690A/ja
Publication of JPS544914B2 publication Critical patent/JPS544914B2/ja
Granted legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP14657476A 1976-12-08 1976-12-08 Manufacturing apparatus for band type silicon crystal Granted JPS5371690A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14657476A JPS5371690A (en) 1976-12-08 1976-12-08 Manufacturing apparatus for band type silicon crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14657476A JPS5371690A (en) 1976-12-08 1976-12-08 Manufacturing apparatus for band type silicon crystal

Publications (2)

Publication Number Publication Date
JPS5371690A JPS5371690A (en) 1978-06-26
JPS544914B2 true JPS544914B2 (ja) 1979-03-12

Family

ID=15410759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14657476A Granted JPS5371690A (en) 1976-12-08 1976-12-08 Manufacturing apparatus for band type silicon crystal

Country Status (1)

Country Link
JP (1) JPS5371690A (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51146573A (en) * 1975-06-10 1976-12-16 Asahi Chemical Ind Method of producing film excellent in dimensional stability

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51146573A (en) * 1975-06-10 1976-12-16 Asahi Chemical Ind Method of producing film excellent in dimensional stability

Also Published As

Publication number Publication date
JPS5371690A (en) 1978-06-26

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