JPS5446096U - - Google Patents
Info
- Publication number
- JPS5446096U JPS5446096U JP1977121053U JP12105377U JPS5446096U JP S5446096 U JPS5446096 U JP S5446096U JP 1977121053 U JP1977121053 U JP 1977121053U JP 12105377 U JP12105377 U JP 12105377U JP S5446096 U JPS5446096 U JP S5446096U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977121053U JPS5446096U (en) | 1977-09-06 | 1977-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977121053U JPS5446096U (en) | 1977-09-06 | 1977-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5446096U true JPS5446096U (en) | 1979-03-30 |
Family
ID=29077834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977121053U Pending JPS5446096U (en) | 1977-09-06 | 1977-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5446096U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001252864A (en) * | 2000-03-08 | 2001-09-18 | Speedfam Co Ltd | Polishing method and device |
-
1977
- 1977-09-06 JP JP1977121053U patent/JPS5446096U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001252864A (en) * | 2000-03-08 | 2001-09-18 | Speedfam Co Ltd | Polishing method and device |