JPS5444540Y2 - - Google Patents

Info

Publication number
JPS5444540Y2
JPS5444540Y2 JP4252475U JP4252475U JPS5444540Y2 JP S5444540 Y2 JPS5444540 Y2 JP S5444540Y2 JP 4252475 U JP4252475 U JP 4252475U JP 4252475 U JP4252475 U JP 4252475U JP S5444540 Y2 JPS5444540 Y2 JP S5444540Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4252475U
Other languages
Japanese (ja)
Other versions
JPS51122559U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4252475U priority Critical patent/JPS5444540Y2/ja
Publication of JPS51122559U publication Critical patent/JPS51122559U/ja
Application granted granted Critical
Publication of JPS5444540Y2 publication Critical patent/JPS5444540Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP4252475U 1975-03-28 1975-03-28 Expired JPS5444540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4252475U JPS5444540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-03-28 1975-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4252475U JPS5444540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-03-28 1975-03-28

Publications (2)

Publication Number Publication Date
JPS51122559U JPS51122559U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-10-04
JPS5444540Y2 true JPS5444540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-12-21

Family

ID=28171946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4252475U Expired JPS5444540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-03-28 1975-03-28

Country Status (1)

Country Link
JP (1) JPS5444540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS51122559U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-10-04

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