JPS5444273B2 - - Google Patents
Info
- Publication number
- JPS5444273B2 JPS5444273B2 JP9277476A JP9277476A JPS5444273B2 JP S5444273 B2 JPS5444273 B2 JP S5444273B2 JP 9277476 A JP9277476 A JP 9277476A JP 9277476 A JP9277476 A JP 9277476A JP S5444273 B2 JPS5444273 B2 JP S5444273B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9277476A JPS5318615A (en) | 1976-08-05 | 1976-08-05 | Vacuum evaporation of transition metal carbide by hollow cathod discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9277476A JPS5318615A (en) | 1976-08-05 | 1976-08-05 | Vacuum evaporation of transition metal carbide by hollow cathod discharge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5318615A JPS5318615A (en) | 1978-02-21 |
| JPS5444273B2 true JPS5444273B2 (Direct) | 1979-12-25 |
Family
ID=14063759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9277476A Granted JPS5318615A (en) | 1976-08-05 | 1976-08-05 | Vacuum evaporation of transition metal carbide by hollow cathod discharge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5318615A (Direct) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5164049A (ja) * | 1974-11-28 | 1976-06-03 | Toray Industries | Kasadakaseishusokumaruchifuiramentoshi |
| JPH0816263B2 (ja) * | 1986-05-28 | 1996-02-21 | 洋一 村山 | 電子ビ−ム蒸発イオンプレ−テイングとその装置 |
| JP4181332B2 (ja) * | 2002-03-26 | 2008-11-12 | 松下電器産業株式会社 | 薄膜の製造方法及び製造装置 |
| DE102015116351A1 (de) | 2015-09-28 | 2017-03-30 | Von Ardenne Gmbh | Verfahren zur Substratbeschichtung mit Partikeln und Vorrichtung zur Ausführung des Verfahrens |
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1976
- 1976-08-05 JP JP9277476A patent/JPS5318615A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5318615A (en) | 1978-02-21 |