JPS5443548B2 - - Google Patents
Info
- Publication number
- JPS5443548B2 JPS5443548B2 JP216373A JP216373A JPS5443548B2 JP S5443548 B2 JPS5443548 B2 JP S5443548B2 JP 216373 A JP216373 A JP 216373A JP 216373 A JP216373 A JP 216373A JP S5443548 B2 JPS5443548 B2 JP S5443548B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP216373A JPS5443548B2 (is") | 1972-12-26 | 1972-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP216373A JPS5443548B2 (is") | 1972-12-26 | 1972-12-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4987752A JPS4987752A (is") | 1974-08-22 |
| JPS5443548B2 true JPS5443548B2 (is") | 1979-12-20 |
Family
ID=11521676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP216373A Expired JPS5443548B2 (is") | 1972-12-26 | 1972-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5443548B2 (is") |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4060407A1 (en) | 2021-03-17 | 2022-09-21 | Shin-Etsu Chemical Co., Ltd. | Chemically amplified positive resist composition and resist pattern forming process |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5379952A (en) * | 1976-12-23 | 1978-07-14 | Nippon Asbestos Co Ltd | Method of production of membrane of diaphragm valve |
| JP2698375B2 (ja) * | 1988-05-24 | 1998-01-19 | 科学技術庁航空宇宙技術研究所長 | 四フッ化エチレン樹脂組成物 |
| JPH02189988A (ja) * | 1989-01-18 | 1990-07-25 | Central Glass Co Ltd | エキシマーレーザー装置 |
-
1972
- 1972-12-26 JP JP216373A patent/JPS5443548B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4060407A1 (en) | 2021-03-17 | 2022-09-21 | Shin-Etsu Chemical Co., Ltd. | Chemically amplified positive resist composition and resist pattern forming process |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4987752A (is") | 1974-08-22 |