JPS5442588B2 - - Google Patents
Info
- Publication number
- JPS5442588B2 JPS5442588B2 JP14163176A JP14163176A JPS5442588B2 JP S5442588 B2 JPS5442588 B2 JP S5442588B2 JP 14163176 A JP14163176 A JP 14163176A JP 14163176 A JP14163176 A JP 14163176A JP S5442588 B2 JPS5442588 B2 JP S5442588B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14163176A JPS5365669A (en) | 1976-11-25 | 1976-11-25 | Electron beam deflection circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14163176A JPS5365669A (en) | 1976-11-25 | 1976-11-25 | Electron beam deflection circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5365669A JPS5365669A (en) | 1978-06-12 |
| JPS5442588B2 true JPS5442588B2 (OSRAM) | 1979-12-14 |
Family
ID=15296519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14163176A Granted JPS5365669A (en) | 1976-11-25 | 1976-11-25 | Electron beam deflection circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5365669A (OSRAM) |
-
1976
- 1976-11-25 JP JP14163176A patent/JPS5365669A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5365669A (en) | 1978-06-12 |