JPS5442377A - Manufacture of thin film - Google Patents
Manufacture of thin filmInfo
- Publication number
- JPS5442377A JPS5442377A JP10798477A JP10798477A JPS5442377A JP S5442377 A JPS5442377 A JP S5442377A JP 10798477 A JP10798477 A JP 10798477A JP 10798477 A JP10798477 A JP 10798477A JP S5442377 A JPS5442377 A JP S5442377A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- thin film
- thin
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10798477A JPS5442377A (en) | 1977-09-09 | 1977-09-09 | Manufacture of thin film |
US05/936,124 US4349425A (en) | 1977-09-09 | 1978-08-23 | Transparent conductive films and methods of producing same |
DE19782839057 DE2839057A1 (en) | 1977-09-09 | 1978-09-07 | TRANSPARENT CONDUCTIVE LAYERS AND METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE LAYERS |
US06/369,078 US4423403A (en) | 1977-09-09 | 1982-04-16 | Transparent conductive films and methods of producing same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10798477A JPS5442377A (en) | 1977-09-09 | 1977-09-09 | Manufacture of thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5442377A true JPS5442377A (en) | 1979-04-04 |
JPS6229506B2 JPS6229506B2 (en) | 1987-06-26 |
Family
ID=14473022
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10798477A Granted JPS5442377A (en) | 1977-09-09 | 1977-09-09 | Manufacture of thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5442377A (en) |
-
1977
- 1977-09-09 JP JP10798477A patent/JPS5442377A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6229506B2 (en) | 1987-06-26 |
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