JPS5442377A - Manufacture of thin film - Google Patents

Manufacture of thin film

Info

Publication number
JPS5442377A
JPS5442377A JP10798477A JP10798477A JPS5442377A JP S5442377 A JPS5442377 A JP S5442377A JP 10798477 A JP10798477 A JP 10798477A JP 10798477 A JP10798477 A JP 10798477A JP S5442377 A JPS5442377 A JP S5442377A
Authority
JP
Japan
Prior art keywords
manufacture
thin film
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10798477A
Other languages
Japanese (ja)
Other versions
JPS6229506B2 (en
Inventor
Seiji Miyake
Naoyuki Miyata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP10798477A priority Critical patent/JPS5442377A/en
Priority to US05/936,124 priority patent/US4349425A/en
Priority to DE19782839057 priority patent/DE2839057A1/en
Publication of JPS5442377A publication Critical patent/JPS5442377A/en
Priority to US06/369,078 priority patent/US4423403A/en
Publication of JPS6229506B2 publication Critical patent/JPS6229506B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10798477A 1977-09-09 1977-09-09 Manufacture of thin film Granted JPS5442377A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10798477A JPS5442377A (en) 1977-09-09 1977-09-09 Manufacture of thin film
US05/936,124 US4349425A (en) 1977-09-09 1978-08-23 Transparent conductive films and methods of producing same
DE19782839057 DE2839057A1 (en) 1977-09-09 1978-09-07 TRANSPARENT CONDUCTIVE LAYERS AND METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE LAYERS
US06/369,078 US4423403A (en) 1977-09-09 1982-04-16 Transparent conductive films and methods of producing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10798477A JPS5442377A (en) 1977-09-09 1977-09-09 Manufacture of thin film

Publications (2)

Publication Number Publication Date
JPS5442377A true JPS5442377A (en) 1979-04-04
JPS6229506B2 JPS6229506B2 (en) 1987-06-26

Family

ID=14473022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10798477A Granted JPS5442377A (en) 1977-09-09 1977-09-09 Manufacture of thin film

Country Status (1)

Country Link
JP (1) JPS5442377A (en)

Also Published As

Publication number Publication date
JPS6229506B2 (en) 1987-06-26

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