JPS5441396B2 - - Google Patents
Info
- Publication number
- JPS5441396B2 JPS5441396B2 JP6102275A JP6102275A JPS5441396B2 JP S5441396 B2 JPS5441396 B2 JP S5441396B2 JP 6102275 A JP6102275 A JP 6102275A JP 6102275 A JP6102275 A JP 6102275A JP S5441396 B2 JPS5441396 B2 JP S5441396B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6102275A JPS51137391A (en) | 1975-05-23 | 1975-05-23 | Semiconductor pressure sensitive element and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6102275A JPS51137391A (en) | 1975-05-23 | 1975-05-23 | Semiconductor pressure sensitive element and its manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51137391A JPS51137391A (en) | 1976-11-27 |
JPS5441396B2 true JPS5441396B2 (fi) | 1979-12-07 |
Family
ID=13159258
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6102275A Granted JPS51137391A (en) | 1975-05-23 | 1975-05-23 | Semiconductor pressure sensitive element and its manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51137391A (fi) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5257238U (fi) * | 1976-10-13 | 1977-04-25 |
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1975
- 1975-05-23 JP JP6102275A patent/JPS51137391A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS51137391A (en) | 1976-11-27 |