JPS5441396B2 - - Google Patents

Info

Publication number
JPS5441396B2
JPS5441396B2 JP6102275A JP6102275A JPS5441396B2 JP S5441396 B2 JPS5441396 B2 JP S5441396B2 JP 6102275 A JP6102275 A JP 6102275A JP 6102275 A JP6102275 A JP 6102275A JP S5441396 B2 JPS5441396 B2 JP S5441396B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6102275A
Other languages
Japanese (ja)
Other versions
JPS51137391A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6102275A priority Critical patent/JPS51137391A/en
Publication of JPS51137391A publication Critical patent/JPS51137391A/en
Publication of JPS5441396B2 publication Critical patent/JPS5441396B2/ja
Granted legal-status Critical Current

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  • Pressure Sensors (AREA)
JP6102275A 1975-05-23 1975-05-23 Semiconductor pressure sensitive element and its manufacturing method Granted JPS51137391A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6102275A JPS51137391A (en) 1975-05-23 1975-05-23 Semiconductor pressure sensitive element and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6102275A JPS51137391A (en) 1975-05-23 1975-05-23 Semiconductor pressure sensitive element and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS51137391A JPS51137391A (en) 1976-11-27
JPS5441396B2 true JPS5441396B2 (en) 1979-12-07

Family

ID=13159258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6102275A Granted JPS51137391A (en) 1975-05-23 1975-05-23 Semiconductor pressure sensitive element and its manufacturing method

Country Status (1)

Country Link
JP (1) JPS51137391A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5257238U (en) * 1976-10-13 1977-04-25

Also Published As

Publication number Publication date
JPS51137391A (en) 1976-11-27

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