JPS5441158Y2 - - Google Patents

Info

Publication number
JPS5441158Y2
JPS5441158Y2 JP16934175U JP16934175U JPS5441158Y2 JP S5441158 Y2 JPS5441158 Y2 JP S5441158Y2 JP 16934175 U JP16934175 U JP 16934175U JP 16934175 U JP16934175 U JP 16934175U JP S5441158 Y2 JPS5441158 Y2 JP S5441158Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16934175U
Other languages
Japanese (ja)
Other versions
JPS5281444U (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16934175U priority Critical patent/JPS5441158Y2/ja
Publication of JPS5281444U publication Critical patent/JPS5281444U/ja
Application granted granted Critical
Publication of JPS5441158Y2 publication Critical patent/JPS5441158Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16934175U 1975-12-17 1975-12-17 Expired JPS5441158Y2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16934175U JPS5441158Y2 (xx) 1975-12-17 1975-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16934175U JPS5441158Y2 (xx) 1975-12-17 1975-12-17

Publications (2)

Publication Number Publication Date
JPS5281444U JPS5281444U (xx) 1977-06-17
JPS5441158Y2 true JPS5441158Y2 (xx) 1979-12-03

Family

ID=28647890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16934175U Expired JPS5441158Y2 (xx) 1975-12-17 1975-12-17

Country Status (1)

Country Link
JP (1) JPS5441158Y2 (xx)

Also Published As

Publication number Publication date
JPS5281444U (xx) 1977-06-17

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