JPS5440452Y2 - - Google Patents

Info

Publication number
JPS5440452Y2
JPS5440452Y2 JP17852276U JP17852276U JPS5440452Y2 JP S5440452 Y2 JPS5440452 Y2 JP S5440452Y2 JP 17852276 U JP17852276 U JP 17852276U JP 17852276 U JP17852276 U JP 17852276U JP S5440452 Y2 JPS5440452 Y2 JP S5440452Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17852276U
Other languages
Japanese (ja)
Other versions
JPS5394943U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17852276U priority Critical patent/JPS5440452Y2/ja
Publication of JPS5394943U publication Critical patent/JPS5394943U/ja
Application granted granted Critical
Publication of JPS5440452Y2 publication Critical patent/JPS5440452Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17852276U 1976-12-29 1976-12-29 Expired JPS5440452Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17852276U JPS5440452Y2 (enrdf_load_stackoverflow) 1976-12-29 1976-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17852276U JPS5440452Y2 (enrdf_load_stackoverflow) 1976-12-29 1976-12-29

Publications (2)

Publication Number Publication Date
JPS5394943U JPS5394943U (enrdf_load_stackoverflow) 1978-08-02
JPS5440452Y2 true JPS5440452Y2 (enrdf_load_stackoverflow) 1979-11-28

Family

ID=28785739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17852276U Expired JPS5440452Y2 (enrdf_load_stackoverflow) 1976-12-29 1976-12-29

Country Status (1)

Country Link
JP (1) JPS5440452Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6885205B2 (ja) * 2017-06-12 2021-06-09 株式会社豊田中央研究所 金属蒸気供給装置、金属／金属化合物製造装置、金属窒化物単結晶の製造方法、及びナノ粒子の製造方法

Also Published As

Publication number Publication date
JPS5394943U (enrdf_load_stackoverflow) 1978-08-02

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