JPS5440451Y2 - - Google Patents

Info

Publication number
JPS5440451Y2
JPS5440451Y2 JP9475975U JP9475975U JPS5440451Y2 JP S5440451 Y2 JPS5440451 Y2 JP S5440451Y2 JP 9475975 U JP9475975 U JP 9475975U JP 9475975 U JP9475975 U JP 9475975U JP S5440451 Y2 JPS5440451 Y2 JP S5440451Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9475975U
Other languages
Japanese (ja)
Other versions
JPS527821U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9475975U priority Critical patent/JPS5440451Y2/ja
Publication of JPS527821U publication Critical patent/JPS527821U/ja
Application granted granted Critical
Publication of JPS5440451Y2 publication Critical patent/JPS5440451Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9475975U 1975-07-04 1975-07-04 Expired JPS5440451Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9475975U JPS5440451Y2 (en:Method) 1975-07-04 1975-07-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9475975U JPS5440451Y2 (en:Method) 1975-07-04 1975-07-04

Publications (2)

Publication Number Publication Date
JPS527821U JPS527821U (en:Method) 1977-01-20
JPS5440451Y2 true JPS5440451Y2 (en:Method) 1979-11-28

Family

ID=28576568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9475975U Expired JPS5440451Y2 (en:Method) 1975-07-04 1975-07-04

Country Status (1)

Country Link
JP (1) JPS5440451Y2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621174Y2 (en:Method) * 1978-08-12 1981-05-19
JPS6185284U (en:Method) * 1984-11-10 1986-06-04

Also Published As

Publication number Publication date
JPS527821U (en:Method) 1977-01-20

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