JPS5440451Y2 - - Google Patents

Info

Publication number
JPS5440451Y2
JPS5440451Y2 JP9475975U JP9475975U JPS5440451Y2 JP S5440451 Y2 JPS5440451 Y2 JP S5440451Y2 JP 9475975 U JP9475975 U JP 9475975U JP 9475975 U JP9475975 U JP 9475975U JP S5440451 Y2 JPS5440451 Y2 JP S5440451Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9475975U
Other languages
Japanese (ja)
Other versions
JPS527821U (da
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9475975U priority Critical patent/JPS5440451Y2/ja
Publication of JPS527821U publication Critical patent/JPS527821U/ja
Application granted granted Critical
Publication of JPS5440451Y2 publication Critical patent/JPS5440451Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9475975U 1975-07-04 1975-07-04 Expired JPS5440451Y2 (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9475975U JPS5440451Y2 (da) 1975-07-04 1975-07-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9475975U JPS5440451Y2 (da) 1975-07-04 1975-07-04

Publications (2)

Publication Number Publication Date
JPS527821U JPS527821U (da) 1977-01-20
JPS5440451Y2 true JPS5440451Y2 (da) 1979-11-28

Family

ID=28576568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9475975U Expired JPS5440451Y2 (da) 1975-07-04 1975-07-04

Country Status (1)

Country Link
JP (1) JPS5440451Y2 (da)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621174Y2 (da) * 1978-08-12 1981-05-19
JPS6185284U (da) * 1984-11-10 1986-06-04

Also Published As

Publication number Publication date
JPS527821U (da) 1977-01-20

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