JPS5439475Y2 - - Google Patents

Info

Publication number
JPS5439475Y2
JPS5439475Y2 JP1975017665U JP1766575U JPS5439475Y2 JP S5439475 Y2 JPS5439475 Y2 JP S5439475Y2 JP 1975017665 U JP1975017665 U JP 1975017665U JP 1766575 U JP1766575 U JP 1766575U JP S5439475 Y2 JPS5439475 Y2 JP S5439475Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975017665U
Other languages
Japanese (ja)
Other versions
JPS5199744U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975017665U priority Critical patent/JPS5439475Y2/ja
Publication of JPS5199744U publication Critical patent/JPS5199744U/ja
Application granted granted Critical
Publication of JPS5439475Y2 publication Critical patent/JPS5439475Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
JP1975017665U 1975-02-07 1975-02-07 Expired JPS5439475Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975017665U JPS5439475Y2 (enrdf_load_stackoverflow) 1975-02-07 1975-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975017665U JPS5439475Y2 (enrdf_load_stackoverflow) 1975-02-07 1975-02-07

Publications (2)

Publication Number Publication Date
JPS5199744U JPS5199744U (enrdf_load_stackoverflow) 1976-08-10
JPS5439475Y2 true JPS5439475Y2 (enrdf_load_stackoverflow) 1979-11-21

Family

ID=28102218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975017665U Expired JPS5439475Y2 (enrdf_load_stackoverflow) 1975-02-07 1975-02-07

Country Status (1)

Country Link
JP (1) JPS5439475Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006314864A (ja) * 2005-05-10 2006-11-24 Mitsubishi Electric Corp 排気トラップ装置
JP5217700B2 (ja) * 2008-07-04 2013-06-19 三菱電機株式会社 半導体製造装置および排気トラップ装置

Also Published As

Publication number Publication date
JPS5199744U (enrdf_load_stackoverflow) 1976-08-10

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