JPS5438853Y2 - - Google Patents

Info

Publication number
JPS5438853Y2
JPS5438853Y2 JP4062476U JP4062476U JPS5438853Y2 JP S5438853 Y2 JPS5438853 Y2 JP S5438853Y2 JP 4062476 U JP4062476 U JP 4062476U JP 4062476 U JP4062476 U JP 4062476U JP S5438853 Y2 JPS5438853 Y2 JP S5438853Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4062476U
Other languages
Japanese (ja)
Other versions
JPS52131948U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4062476U priority Critical patent/JPS5438853Y2/ja
Publication of JPS52131948U publication Critical patent/JPS52131948U/ja
Application granted granted Critical
Publication of JPS5438853Y2 publication Critical patent/JPS5438853Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP4062476U 1976-04-01 1976-04-01 Expired JPS5438853Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4062476U JPS5438853Y2 (enExample) 1976-04-01 1976-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4062476U JPS5438853Y2 (enExample) 1976-04-01 1976-04-01

Publications (2)

Publication Number Publication Date
JPS52131948U JPS52131948U (enExample) 1977-10-06
JPS5438853Y2 true JPS5438853Y2 (enExample) 1979-11-17

Family

ID=28499735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4062476U Expired JPS5438853Y2 (enExample) 1976-04-01 1976-04-01

Country Status (1)

Country Link
JP (1) JPS5438853Y2 (enExample)

Also Published As

Publication number Publication date
JPS52131948U (enExample) 1977-10-06

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