JPS5438594B2 - - Google Patents
Info
- Publication number
- JPS5438594B2 JPS5438594B2 JP6998672A JP6998672A JPS5438594B2 JP S5438594 B2 JPS5438594 B2 JP S5438594B2 JP 6998672 A JP6998672 A JP 6998672A JP 6998672 A JP6998672 A JP 6998672A JP S5438594 B2 JPS5438594 B2 JP S5438594B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6998672A JPS5438594B2 (https=) | 1972-07-14 | 1972-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6998672A JPS5438594B2 (https=) | 1972-07-14 | 1972-07-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4928584A JPS4928584A (https=) | 1974-03-14 |
| JPS5438594B2 true JPS5438594B2 (https=) | 1979-11-21 |
Family
ID=13418488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6998672A Expired JPS5438594B2 (https=) | 1972-07-14 | 1972-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5438594B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5329739U (https=) * | 1976-08-09 | 1978-03-14 | ||
| JPS5348143U (https=) * | 1976-09-28 | 1978-04-24 | ||
| JPS5361414U (https=) * | 1976-10-28 | 1978-05-25 |
-
1972
- 1972-07-14 JP JP6998672A patent/JPS5438594B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4928584A (https=) | 1974-03-14 |