JPS5435068B2 - - Google Patents
Info
- Publication number
- JPS5435068B2 JPS5435068B2 JP9228376A JP9228376A JPS5435068B2 JP S5435068 B2 JPS5435068 B2 JP S5435068B2 JP 9228376 A JP9228376 A JP 9228376A JP 9228376 A JP9228376 A JP 9228376A JP S5435068 B2 JPS5435068 B2 JP S5435068B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9228376A JPS52155060A (en) | 1976-08-04 | 1976-08-04 | Device for high presure oxidation diffusion for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9228376A JPS52155060A (en) | 1976-08-04 | 1976-08-04 | Device for high presure oxidation diffusion for semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52155060A JPS52155060A (en) | 1977-12-23 |
| JPS5435068B2 true JPS5435068B2 (cs) | 1979-10-31 |
Family
ID=14050065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9228376A Granted JPS52155060A (en) | 1976-08-04 | 1976-08-04 | Device for high presure oxidation diffusion for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52155060A (cs) |
-
1976
- 1976-08-04 JP JP9228376A patent/JPS52155060A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52155060A (en) | 1977-12-23 |