JPS5433955B2 - - Google Patents
Info
- Publication number
- JPS5433955B2 JPS5433955B2 JP9228476A JP9228476A JPS5433955B2 JP S5433955 B2 JPS5433955 B2 JP S5433955B2 JP 9228476 A JP9228476 A JP 9228476A JP 9228476 A JP9228476 A JP 9228476A JP S5433955 B2 JPS5433955 B2 JP S5433955B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9228476A JPS52155061A (en) | 1976-08-04 | 1976-08-04 | Device for high pressure oxidation diffusion for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9228476A JPS52155061A (en) | 1976-08-04 | 1976-08-04 | Device for high pressure oxidation diffusion for semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52155061A JPS52155061A (en) | 1977-12-23 |
| JPS5433955B2 true JPS5433955B2 (ja) | 1979-10-24 |
Family
ID=14050096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9228476A Granted JPS52155061A (en) | 1976-08-04 | 1976-08-04 | Device for high pressure oxidation diffusion for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52155061A (ja) |
-
1976
- 1976-08-04 JP JP9228476A patent/JPS52155061A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52155061A (en) | 1977-12-23 |