JPS543344B2 - - Google Patents
Info
- Publication number
- JPS543344B2 JPS543344B2 JP10323776A JP10323776A JPS543344B2 JP S543344 B2 JPS543344 B2 JP S543344B2 JP 10323776 A JP10323776 A JP 10323776A JP 10323776 A JP10323776 A JP 10323776A JP S543344 B2 JPS543344 B2 JP S543344B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10323776A JPS5329075A (en) | 1976-08-31 | 1976-08-31 | Plasma treating apparatus of semiconductor substrates |
| US05/828,812 US4138306A (en) | 1976-08-31 | 1977-08-29 | Apparatus for the treatment of semiconductors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10323776A JPS5329075A (en) | 1976-08-31 | 1976-08-31 | Plasma treating apparatus of semiconductor substrates |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5329075A JPS5329075A (en) | 1978-03-17 |
| JPS543344B2 true JPS543344B2 (en) | 1979-02-21 |
Family
ID=14348829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10323776A Granted JPS5329075A (en) | 1976-08-31 | 1976-08-31 | Plasma treating apparatus of semiconductor substrates |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5329075A (en) |
-
1976
- 1976-08-31 JP JP10323776A patent/JPS5329075A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5329075A (en) | 1978-03-17 |