JPS543343B2 - - Google Patents
Info
- Publication number
- JPS543343B2 JPS543343B2 JP10323676A JP10323676A JPS543343B2 JP S543343 B2 JPS543343 B2 JP S543343B2 JP 10323676 A JP10323676 A JP 10323676A JP 10323676 A JP10323676 A JP 10323676A JP S543343 B2 JPS543343 B2 JP S543343B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10323676A JPS5329074A (en) | 1976-08-31 | 1976-08-31 | Plasma treating apparatus for semiconductor |
| US05/828,812 US4138306A (en) | 1976-08-31 | 1977-08-29 | Apparatus for the treatment of semiconductors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10323676A JPS5329074A (en) | 1976-08-31 | 1976-08-31 | Plasma treating apparatus for semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5329074A JPS5329074A (en) | 1978-03-17 |
| JPS543343B2 true JPS543343B2 (OSRAM) | 1979-02-21 |
Family
ID=14348803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10323676A Granted JPS5329074A (en) | 1976-08-31 | 1976-08-31 | Plasma treating apparatus for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5329074A (OSRAM) |
-
1976
- 1976-08-31 JP JP10323676A patent/JPS5329074A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5329074A (en) | 1978-03-17 |