JPS5433238A - Feeding apparatus of material for vacuum deposition - Google Patents

Feeding apparatus of material for vacuum deposition

Info

Publication number
JPS5433238A
JPS5433238A JP9922477A JP9922477A JPS5433238A JP S5433238 A JPS5433238 A JP S5433238A JP 9922477 A JP9922477 A JP 9922477A JP 9922477 A JP9922477 A JP 9922477A JP S5433238 A JPS5433238 A JP S5433238A
Authority
JP
Japan
Prior art keywords
vacuum deposition
feeding apparatus
evaporation
composing
productivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9922477A
Other languages
Japanese (ja)
Other versions
JPS6013066B2 (en
Inventor
Shizuyasu Yanagisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9922477A priority Critical patent/JPS6013066B2/en
Publication of JPS5433238A publication Critical patent/JPS5433238A/en
Publication of JPS6013066B2 publication Critical patent/JPS6013066B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To enable to carry out feeding operation of material for vacuum deposition with a good yield and productivity, by cutting the material for evaporation in width direction by cutter and at the same time, composing so as cut material to be wrapped on the outer circumference of power source for evaporation.
JP9922477A 1977-08-19 1977-08-19 Deposition material supply device Expired JPS6013066B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9922477A JPS6013066B2 (en) 1977-08-19 1977-08-19 Deposition material supply device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9922477A JPS6013066B2 (en) 1977-08-19 1977-08-19 Deposition material supply device

Publications (2)

Publication Number Publication Date
JPS5433238A true JPS5433238A (en) 1979-03-10
JPS6013066B2 JPS6013066B2 (en) 1985-04-04

Family

ID=14241682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9922477A Expired JPS6013066B2 (en) 1977-08-19 1977-08-19 Deposition material supply device

Country Status (1)

Country Link
JP (1) JPS6013066B2 (en)

Also Published As

Publication number Publication date
JPS6013066B2 (en) 1985-04-04

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