JPS5432637B2 - - Google Patents
Info
- Publication number
- JPS5432637B2 JPS5432637B2 JP11250375A JP11250375A JPS5432637B2 JP S5432637 B2 JPS5432637 B2 JP S5432637B2 JP 11250375 A JP11250375 A JP 11250375A JP 11250375 A JP11250375 A JP 11250375A JP S5432637 B2 JPS5432637 B2 JP S5432637B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
- Physical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50112503A JPS5237577A (en) | 1975-09-17 | 1975-09-17 | Apparatus for forming coating by ion spattering process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50112503A JPS5237577A (en) | 1975-09-17 | 1975-09-17 | Apparatus for forming coating by ion spattering process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5237577A JPS5237577A (en) | 1977-03-23 |
| JPS5432637B2 true JPS5432637B2 (zh) | 1979-10-16 |
Family
ID=14588271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50112503A Granted JPS5237577A (en) | 1975-09-17 | 1975-09-17 | Apparatus for forming coating by ion spattering process |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5237577A (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5825041B2 (ja) * | 1979-08-03 | 1983-05-25 | 日本電信電話株式会社 | ダイヤモンド状炭素膜の製造方法 |
| JPH0527804Y2 (zh) * | 1986-03-12 | 1993-07-15 |
-
1975
- 1975-09-17 JP JP50112503A patent/JPS5237577A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5237577A (en) | 1977-03-23 |