JPS5432636B2 - - Google Patents
Info
- Publication number
- JPS5432636B2 JPS5432636B2 JP8978575A JP8978575A JPS5432636B2 JP S5432636 B2 JPS5432636 B2 JP S5432636B2 JP 8978575 A JP8978575 A JP 8978575A JP 8978575 A JP8978575 A JP 8978575A JP S5432636 B2 JPS5432636 B2 JP S5432636B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8978575A JPS5213461A (en) | 1975-07-23 | 1975-07-23 | Device for manufacturing thin metal film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8978575A JPS5213461A (en) | 1975-07-23 | 1975-07-23 | Device for manufacturing thin metal film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5213461A JPS5213461A (en) | 1977-02-01 |
| JPS5432636B2 true JPS5432636B2 (enExample) | 1979-10-16 |
Family
ID=13980324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8978575A Granted JPS5213461A (en) | 1975-07-23 | 1975-07-23 | Device for manufacturing thin metal film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5213461A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10638750B2 (en) | 2004-05-20 | 2020-05-05 | Eden Research Plc | Compositions containing a hollow glucan particle or a cell wall particle encapsulating a terpene component, methods of making and using them |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58695Y2 (ja) * | 1978-04-17 | 1983-01-07 | 日本真空技術株式会社 | ドライプレ−テイング装置 |
-
1975
- 1975-07-23 JP JP8978575A patent/JPS5213461A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10638750B2 (en) | 2004-05-20 | 2020-05-05 | Eden Research Plc | Compositions containing a hollow glucan particle or a cell wall particle encapsulating a terpene component, methods of making and using them |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5213461A (en) | 1977-02-01 |