JPS5432509B2 - - Google Patents
Info
- Publication number
- JPS5432509B2 JPS5432509B2 JP5424372A JP5424372A JPS5432509B2 JP S5432509 B2 JPS5432509 B2 JP S5432509B2 JP 5424372 A JP5424372 A JP 5424372A JP 5424372 A JP5424372 A JP 5424372A JP S5432509 B2 JPS5432509 B2 JP S5432509B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Inorganic Insulating Materials (AREA)
- Compositions Of Oxide Ceramics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5424372A JPS5432509B2 (https=) | 1972-06-02 | 1972-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5424372A JPS5432509B2 (https=) | 1972-06-02 | 1972-06-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4915000A JPS4915000A (https=) | 1974-02-08 |
| JPS5432509B2 true JPS5432509B2 (https=) | 1979-10-15 |
Family
ID=12965090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5424372A Expired JPS5432509B2 (https=) | 1972-06-02 | 1972-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5432509B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3874919A (en) * | 1974-03-13 | 1975-04-01 | Ibm | Oxidation resistant mask layer and process for producing recessed oxide region in a silicon body |
| JPS5271536U (https=) * | 1975-11-21 | 1977-05-28 | ||
| JPS58194343A (ja) * | 1982-05-10 | 1983-11-12 | Toshiba Corp | 半導体装置の製造方法 |
| US4618541A (en) * | 1984-12-21 | 1986-10-21 | Advanced Micro Devices, Inc. | Method of forming a silicon nitride film transparent to ultraviolet radiation and resulting article |
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1972
- 1972-06-02 JP JP5424372A patent/JPS5432509B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4915000A (https=) | 1974-02-08 |