JPS5432072A - Photomask - Google Patents

Photomask

Info

Publication number
JPS5432072A
JPS5432072A JP9805577A JP9805577A JPS5432072A JP S5432072 A JPS5432072 A JP S5432072A JP 9805577 A JP9805577 A JP 9805577A JP 9805577 A JP9805577 A JP 9805577A JP S5432072 A JPS5432072 A JP S5432072A
Authority
JP
Japan
Prior art keywords
photomask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9805577A
Other languages
Japanese (ja)
Inventor
Yasuo Matsumoto
Makoto Nakase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP9805577A priority Critical patent/JPS5432072A/en
Publication of JPS5432072A publication Critical patent/JPS5432072A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9805577A 1977-08-16 1977-08-16 Photomask Pending JPS5432072A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9805577A JPS5432072A (en) 1977-08-16 1977-08-16 Photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9805577A JPS5432072A (en) 1977-08-16 1977-08-16 Photomask

Publications (1)

Publication Number Publication Date
JPS5432072A true JPS5432072A (en) 1979-03-09

Family

ID=14209569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9805577A Pending JPS5432072A (en) 1977-08-16 1977-08-16 Photomask

Country Status (1)

Country Link
JP (1) JPS5432072A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02181754A (en) * 1989-01-07 1990-07-16 Seiko Instr Inc Photomask

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4921898A (en) * 1972-06-23 1974-02-26
JPS4936863B1 (en) * 1970-11-30 1974-10-03

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4936863B1 (en) * 1970-11-30 1974-10-03
JPS4921898A (en) * 1972-06-23 1974-02-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02181754A (en) * 1989-01-07 1990-07-16 Seiko Instr Inc Photomask

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JPS5432072A (en) Photomask