JPS5429982A - Automatic contour checking device - Google Patents
Automatic contour checking deviceInfo
- Publication number
- JPS5429982A JPS5429982A JP9507377A JP9507377A JPS5429982A JP S5429982 A JPS5429982 A JP S5429982A JP 9507377 A JP9507377 A JP 9507377A JP 9507377 A JP9507377 A JP 9507377A JP S5429982 A JPS5429982 A JP S5429982A
- Authority
- JP
- Japan
- Prior art keywords
- checking device
- automatic contour
- contour checking
- pattern
- automatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To check automatically a fine breakaway, contamination and an isolated part inside a pattern when checking the concave two-dimentional pattern with its surface uniform.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52095073A JPS59973B2 (en) | 1977-08-10 | 1977-08-10 | Automatic visual inspection equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52095073A JPS59973B2 (en) | 1977-08-10 | 1977-08-10 | Automatic visual inspection equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5429982A true JPS5429982A (en) | 1979-03-06 |
JPS59973B2 JPS59973B2 (en) | 1984-01-10 |
Family
ID=14127800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52095073A Expired JPS59973B2 (en) | 1977-08-10 | 1977-08-10 | Automatic visual inspection equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59973B2 (en) |
-
1977
- 1977-08-10 JP JP52095073A patent/JPS59973B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS59973B2 (en) | 1984-01-10 |
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